Interconnects (34) include an inside interconnect section (40) and an outside interconnect section (41). The inside interconnect section (40) includes a first interconnect layer (42), a second interconnect layer (43), and a connection section (44) that connects the first interconnect layer (42) and the second interconnect layer (43). The outside interconnect section (41) includes a third interconnect layer (45). Of a plurality of interconnects (34), in one interconnect (X) of neighboring interconnects the second interconnect layer (43) and the third interconnect layer (45) are connected, and in another of the neighboring interconnects (Y), the first interconnect layer (42) and the third interconnect layer (45) are connected.