Invention Grant
- Patent Title: Workpiece double-disc grinding method
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Application No.: US15116130Application Date: 2015-01-23
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Publication No.: US09962802B2Publication Date: 2018-05-08
- Inventor: Yoshihiro Usami
- Applicant: SHIN-ETSU HANDOTAI CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2014-031004 20140220
- International Application: PCT/JP2015/000295 WO 20150123
- International Announcement: WO2015/125412 WO 20150827
- Main IPC: B24B7/16
- IPC: B24B7/16 ; B24B7/17 ; H01L21/02

Abstract:
The present invention is a workpiece double-disc grinding method including supporting a sheet workpiece along a circumferential direction from an outer circumference side of the workpiece by a ring holder, and simultaneously grinding both surfaces of the workpiece supported by the ring holder with a pair of grinding wheels while rotating the ring holder, wherein the surfaces of the workpiece are simultaneously ground such that a wear amount of the grinding wheels per 1 μm of a grinding stock removal of the workpiece ranges from 0.10 μm to 0.33 μm. This workpiece double-disc grinding method can reduce nanotopography formed in previous steps such as a slicing step without degrading the flatness in the double-disc grinding step.
Public/Granted literature
- US20170136596A1 WORKPIECE DOUBLE-DISC GRINDING METHOD Public/Granted day:2017-05-18
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