Invention Grant
- Patent Title: Method of ptychographic imaging
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Application No.: US15186267Application Date: 2016-06-17
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Publication No.: US09959639B2Publication Date: 2018-05-01
- Inventor: Eric Gerardus Theodoor Bosch , Ivan Lazic
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg
- Priority: EP15172752 20150618
- Main IPC: G06T11/00
- IPC: G06T11/00 ; G01N23/04 ; G01T1/17 ; G02B21/00 ; H01J37/22

Abstract:
A method and apparatus for ptychographic imaging is described. Typically a high number of pixels (after binning) is needed to obtain a high quality reconstruction of an object. By using calculation planes with more nodes (for example 512×512 nodes) than the number of pixels of the detector, a high quality reconstruction of an object can be made, even when using for example a 16 segment detector, or a 32×32 pixel detector. Although the reconstructed object shows less resolution (“sharpness”), all features are there.
Public/Granted literature
- US20170024908A1 METHOD OF PTYCHOGRAPHIC IMAGING Public/Granted day:2017-01-26
Information query
IPC分类:
G | 物理 |
G06 | 计算;推算或计数 |
G06T | 一般的图像数据处理或产生 |
G06T11/00 | 2D〔二维〕图像的生成 |