- Patent Title: Optimized buffer layer for high mobility field-effect transistor
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Application No.: US15300712Application Date: 2015-04-03
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Publication No.: US09935192B2Publication Date: 2018-04-03
- Inventor: Jean-Claude Jacquet , Raphaël Aubry , Piero Gamarra , Olivier Jardel , Stéphane Piotrowicz
- Applicant: THALES , COMMISSARIAT A l'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Courbevoie FR Paris
- Assignee: THALES,COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: THALES,COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Courbevoie FR Paris
- Agency: Baker & Hostetler LLP
- Priority: FR1400825 20140404
- International Application: PCT/EP2015/097004 WO 20150403
- International Announcement: WO2015/150582 WO 20151008
- Main IPC: H01L29/36
- IPC: H01L29/36 ; H01L29/778 ; H01L29/20 ; H01L29/205

Abstract:
A stack along a z-axis for a high-electron-mobility field-effect transistor, comprises: a buffer layer comprising a first semiconductor material comprising a binary, ternary or quaternary nitride compound having a first bandgap, a barrier layer comprising a second semiconductor material comprising a binary, ternary or quaternary nitride compound and having a second bandgap, the second bandgap wider than the first bandgap, a heterojunction between the buffer and barrier layers and, a two-dimensional electron gas located in an XY plane perpendicular to the z-axis and in the vicinity of the heterojunction wherein: the buffer layer comprises a zone comprising fixed negative charges of density per unit volume higher than or equal to 1017 cm−3, the zone having a thickness smaller than or equal to 200 nm, the product of multiplication of the density per unit volume of fixed negative charges by the thickness of the zone between 1012 cm−2 and 3.1013 cm−2.
Public/Granted literature
- US20170110565A1 OPTIMIZED BUFFER LAYER FOR HIGH MOBILITY FIELD-EFFECT TRANSISTOR Public/Granted day:2017-04-20
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