Invention Grant
- Patent Title: Self-aligned channel-only semiconductor-on-insulator field effect transistor
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Application No.: US14736639Application Date: 2015-06-11
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Publication No.: US09935178B2Publication Date: 2018-04-03
- Inventor: Effendi Leobandung
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Louis Percello
- Main IPC: H01L29/00
- IPC: H01L29/00 ; H01L29/66 ; H01L29/78

Abstract:
In one example, a field effect transistor includes a fin. The fin includes a conducting channel formed from semiconductor-on-insulator and source/drain regions formed on opposite ends of the conducting channel, wherein the source/drain regions are formed from a material other than semiconductor-on-insulator. A gate is wrapped around the conducting channel, between the source/drain regions. In another example, a method for fabricating a field effect transistor includes forming a fin on a wafer. The fin includes a conducting channel formed from semiconductor-on-insulator and source/drain regions formed on opposite ends of the conducting channel, wherein the source/drain regions are formed from a material other than semiconductor-on-insulator. A gate is also formed between the source/drain regions and wraps around the conducting channel.
Public/Granted literature
- US20160365420A1 SELF-ALIGNED CHANNEL-ONLY SEMICONDUCTOR-ON-INSULATOR FIELD EFFECT TRANSISTOR Public/Granted day:2016-12-15
Information query
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