Invention Grant
- Patent Title: Low noise InGaAs photodiode array
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Application No.: US15025072Application Date: 2014-09-25
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Publication No.: US09935151B2Publication Date: 2018-04-03
- Inventor: Martin H. Ettenberg
- Applicant: PRINCETON INFRARED TECHNOLOGIES, INC.
- Applicant Address: US NJ Monmouth Junction
- Assignee: Princeton Infrared Technologies, Inc.
- Current Assignee: Princeton Infrared Technologies, Inc.
- Current Assignee Address: US NJ Monmouth Junction
- Agency: Fox Rothschild LLP
- International Application: PCT/US2014/057481 WO 20140925
- International Announcement: WO2015/048304 WO 20150402
- Main IPC: H01L29/80
- IPC: H01L29/80 ; H01L27/146 ; H01L29/66 ; H01L29/808 ; H01L31/0304 ; H01L31/105 ; H01L31/18

Abstract:
A photodiode pixel structure for imaging short wave infrared (SWIR) and visible light built in a planar structure and may be used for one dimensional and two dimensional photodiode arrays. The photodiode arrays may be hybridized to a read out integrated circuit (ROIC), for example, a silicon complementary metal-oxide-semiconductor (CMOS) circuit. The photodiode in each pixel is buried under the surface and does not directly contact the ROIC amplification circuit. Charge is transferred form the detector using a junction field effect transistor (JFET) in each pixel. Disconnecting the photodiode from the ROIC amplification circuit enables low dark current as well as double correlated sampling in the pixel.
Public/Granted literature
- US20160218139A1 Low Noise InGaAs Photodiode Array Public/Granted day:2016-07-28
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