Invention Grant
- Patent Title: Solid state imaging device, manufacturing method of solid state imaging device, and imaging system
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Application No.: US15152982Application Date: 2016-05-12
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Publication No.: US09935140B2Publication Date: 2018-04-03
- Inventor: Mari Isobe , Shunsuke Nakatsuka , Masatsugu Itahashi , Yasuhiro Sekine , Sho Suzuki
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2015-101704 20150519; JP2016-081833 20160415
- Main IPC: H01L27/148
- IPC: H01L27/148 ; H01L27/146 ; H04N5/378

Abstract:
A manufacturing method of a solid state imaging device according to one embodiment includes the steps of forming, on a substrate, a gate electrode of a first transistor and a gate electrode of a second transistor adjacent to the first transistor; forming an insulator film covering the gate electrode of the first transistor and the gate electrode of the second transistor such that a void is formed between the gate electrode of the first transistor and the gate electrode of the second transistor; forming a film on the insulator film; and forming a light shielding member by removing a part of the film by an etching.
Public/Granted literature
- US20160343754A1 SOLID STATE IMAGING DEVICE, MANUFACTURING METHOD OF SOLID STATE IMAGING DEVICE, AND IMAGING SYSTEM Public/Granted day:2016-11-24
Information query
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