Invention Grant
- Patent Title: Target adapted to an indirect cooling device
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Application No.: US14390828Application Date: 2013-03-05
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Publication No.: US09934951B2Publication Date: 2018-04-03
- Inventor: Siegfried Krassnitzer , Juerg Hagmann
- Applicant: Oerlikon Surface Solutions AG, Trubbach
- Applicant Address: CH Pfäffikon SZ
- Assignee: OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Current Assignee: OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Current Assignee Address: CH Pfäffikon SZ
- Agency: Pearne & Gordon LLP
- Priority: DE102012006717 20120404
- International Application: PCT/EP2013/000623 WO 20130305
- International Announcement: WO2013/149692 WO 20131010
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/34 ; C23C14/54 ; C09J7/02

Abstract:
The invention relates to a target which is embodied as a material source for a depositing method from the gas phase, comprising a front side and a rear side, characterized in that a self-adhesive carbon film is applied to the rear side. Said target can be embodied as a material source for a sputtering method and/or for an arc evaporation method. A particular advantage is that the target is used in a coating source with indirect cooling, the self-adhesive carbon film being in contact with the surface of the membrane which is part of a cooling channel.
Public/Granted literature
- US20150060261A1 TARGET ADAPTED TO AN INDIRECT COOLING DEVICE Public/Granted day:2015-03-05
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