Invention Grant
- Patent Title: Magnetron-sputtering coating system and method, and display substrate
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Application No.: US14731544Application Date: 2015-06-05
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Publication No.: US09934948B2Publication Date: 2018-04-03
- Inventor: Xiaokun Wang , Sangsoo Park , Xunze Zhang , Zhaobo Wang , Lei Sha , Guanjie Cheng , Wenjun Zhang , Hualu Wang , Qingliang Wen , Leilei Lv
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Applicant Address: CN Beijing CN Hefei
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Beijing CN Hefei
- Agency: Brooks Kushman P.C.
- Priority: CN201410828442 20141226
- Main IPC: C23C14/00
- IPC: C23C14/00 ; H01J37/34 ; C23C14/34 ; C23C14/35 ; C23C14/50 ; C23C14/56 ; C23C14/08

Abstract:
It is provided a magnetron-sputtering coating system including a sputtering chamber. The sputtering chamber therein includes: a set of target, formed by concatenating a plurality pieces of target; a substrate carrier, arranged to be opposite to the target set, and support a substrate to be coated with a film; and a driving device, arranged to drive the substrate carrier to reciprocate in a direction of the arrangement of the target.
Public/Granted literature
- US20160186312A1 MAGNETRON-SPUTTERING COATING SYSTEM AND METHOD, AND DISPLAY SUBSTRATE Public/Granted day:2016-06-30
Information query
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