Invention Grant
- Patent Title: Source housing assembly for controlling ion beam extraction stability and ion beam current
-
Application No.: US14713573Application Date: 2015-05-15
-
Publication No.: US09934928B2Publication Date: 2018-04-03
- Inventor: Shengwu Chang , Jeff Burgess , William Leavitt , Michael St Peter , Matt Mosher , Joe Olson , Frank Sinclair
- Applicant: Varian Semiconductor Equipment Associates, Inc.
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01J37/08
- IPC: H01J37/08 ; H01J27/08 ; H01J27/02 ; H01J9/18 ; H01J9/385 ; H01J3/04 ; H01J5/02

Abstract:
Provided herein are approaches for improving ion beam extraction stability and ion beam current for an ion extraction system. In one approach, a source housing assembly may include a source housing surrounding an ion source including an arc chamber, the source housing having an extraction aperture plate mounted at a proximal end thereof. The source housing assembly further includes a vacuum liner disposed within an interior of the source housing to form a barrier around a set of vacuum pumping apertures. As configured, openings in the source housing assembly, other than an opening in the extraction aperture plate, are enclosed by the extraction aperture plate and the vacuum liner, thus ensuring appendix arcs or extraneous ions produced outside the arc chamber remain within the source housing. Just those ions produced within the arc chamber exit the source housing through the opening of the extraction aperture plate.
Public/Granted literature
- US20160336138A1 SOURCE HOUSING ASSEMBLY FOR CONTROLLING ION BEAM EXTRACTION STABILITY AND ION BEAM CURRENT Public/Granted day:2016-11-17
Information query