Invention Grant
- Patent Title: Probe card and having opposite surfaces with different directions and test apparatus including probe card thereof
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Application No.: US15060856Application Date: 2016-03-04
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Publication No.: US09933478B2Publication Date: 2018-04-03
- Inventor: Tomoko Fujiwara , Takao Sueyama , Keiko Kaneda , Michiko Ego
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2015-070399 20150330
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R31/28 ; G01R1/073
Abstract:
A probe card includes a probe; and a probe card substrate which includes a first member and a second member, the first member having a first surface provided with the probe and the second member having a second surface surrounding the first surface, wherein a direction of the first surface is different from a direction of the second surface.
Public/Granted literature
- US20160291055A1 PROBE CARD AND TEST APPARATUS Public/Granted day:2016-10-06
Information query
