Invention Grant
- Patent Title: Lighting domes with reflective gradient and broad spectrum light source
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Application No.: US14877913Application Date: 2015-10-07
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Publication No.: US09933372B2Publication Date: 2018-04-03
- Inventor: Romik Chatterjee , Robert Martin Eastlund , Christopher Jan Koci , Archer Forrest Finley
- Applicant: Graftek Imaging Inc.
- Applicant Address: US TX Austin
- Assignee: Graftek Imaging, Inc.
- Current Assignee: Graftek Imaging, Inc.
- Current Assignee Address: US TX Austin
- Agency: John Bruckner PC
- Main IPC: H01J3/14
- IPC: H01J3/14 ; G01N21/95 ; G01N21/88 ; G01J1/04
Abstract:
A lighting dome that can be used to inspect semiconductor wafers can include a small aperture, backlighting, a reflectance gradient and/or a broad spectrum light source.
Public/Granted literature
- US20160025651A1 LIGHTING DOMES Public/Granted day:2016-01-28
Information query
