Invention Grant
- Patent Title: Device for detecting radiation including an encapsulating structure having an improved mechanical strength
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Application No.: US15047966Application Date: 2016-02-19
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Publication No.: US09933309B2Publication Date: 2018-04-03
- Inventor: Jean-Jacques Yon , Geoffroy Dumont , Laurent Carle , Pierre Imperinetti , Stephane Pocas
- Applicant: Commissariat A L'Energie Atomique et aux Energies Alternatives
- Applicant Address: FR Paris
- Assignee: Commissariat A L'Energie Atomique et aux Energies Alternatives
- Current Assignee: Commissariat A L'Energie Atomique et aux Energies Alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1551493 20150220
- Main IPC: G01J5/20
- IPC: G01J5/20 ; G01J5/04 ; G01J5/02 ; G01J5/34

Abstract:
A device for detecting electromagnetic radiation is provided, including a substrate; a matrix of thermal detectors disposed on the substrate; and a structure encapsulating the matrix of thermal detectors, including an encapsulating layer extending continuously around and above the matrix of thermal detectors so as to define with the substrate a cavity in which the matrix of thermal detectors is disposed, the encapsulating layer including at least one internal bearing section, which bears directly against the substrate between two adjacent thermal detectors of said matrix, said at least one internal bearing section including a sidewall and a peripheral wall, the sidewall being separate from the peripheral wall in a plane parallel to a plane of the substrate, and the peripheral wall encircling the matrix of thermal detectors.
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