Invention Grant
- Patent Title: Interferometric distance measuring arrangement for measuring surfaces and corresponding method with emission of at least two parallel channels
-
Application No.: US14416217Application Date: 2013-07-18
-
Publication No.: US09933245B2Publication Date: 2018-04-03
- Inventor: Thomas Jensen
- Applicant: HEXAGON TECHNOLOGY CENTER GMBH
- Applicant Address: CH Heerbrugg
- Assignee: HEXAGON TECHNOLOGY CENTER GMBH
- Current Assignee: HEXAGON TECHNOLOGY CENTER GMBH
- Current Assignee Address: CH Heerbrugg
- Agency: Maschoff Brennan
- Priority: EP12177582 20120724
- International Application: PCT/EP2013/065222 WO 20130718
- International Announcement: WO2014/016200 WO 20140130
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/00

Abstract:
The invention relates to an interferometric distance measuring arrangement for measuring surfaces, with at least one laser source, which can be tuned, with a coherence length for generating measurement radiation modulated by a wave length ramp, an optical beam path with an optical transmitting system for emitting the measurement radiation to the surface and an optical capturing system for capturing the measurement radiation back-scattered by the surface, comprising a measuring arm and a reference arm and a radiation detector and an evaluation unit for determining the distance from a reference point of the distance measuring device to the surface. Channels are defined by at least one beamsplitter n≥2 for the parallel emission of measurement radiation, respectively one different sub area of the measurement range defined by the coherence length is allocated to the channels.
Public/Granted literature
- US20150176969A1 INTERFEROMETRIC DISTANCE MEASURING ARRANGEMENT AND CORRESPONDING METHOD Public/Granted day:2015-06-25
Information query