Invention Grant
- Patent Title: Method of producing a cap substrate, and packaged radiation-emitting device
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Application No.: US15173110Application Date: 2016-06-03
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Publication No.: US09912115B2Publication Date: 2018-03-06
- Inventor: Wolfgang Reinert , Hans Joachim Quenzer
- Applicant: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee Address: DE Munich
- Agency: Perkins Coie, LLP
- Agent Michael A. Glenn
- Priority: DE102013113364 20131203; DE102014202220 20140206
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/30 ; H01L23/52 ; H01S5/022 ; H01L33/58 ; H01S5/40 ; C03B23/02 ; C03B23/20 ; H01L23/00 ; H01S5/028 ; H01L33/00 ; H01L33/56

Abstract:
The invention relates to methods of producing a cap substrate, to methods of producing a packaged radiation-emitting device at the wafer level, and to a radiation-emitting device. By producing a cap substrate, providing a device substrate in the form of a wafer including a multitude of radiation-emitting devices, arranging the substrates one above the other such that the substrates are bonded along an intermediate bonding frame, and dicing the packaged radiation-emitting devices, improved packaged radiation-emitting devices are provided which are advantageously arranged within a cavity free from organics and can be examined, still at the wafer level, in terms of their functionalities in a simplified manner prior to being diced.
Public/Granted literature
- US20160285232A1 METHOD OF PRODUCING A CAP SUBSTRATE, AND PACKAGED RADIATION-EMITTING DEVICE Public/Granted day:2016-09-29
Information query
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