Invention Grant
- Patent Title: Thin film transistor substrate including thin film transistor formed of oxide semiconductor and method for manufacturing the same
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Application No.: US15617845Application Date: 2017-06-08
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Publication No.: US09911765B2Publication Date: 2018-03-06
- Inventor: Ken Imamura , Kazushi Yamayoshi , Kazunori Inoue
- Applicant: Mitsubishi Electric Corporation
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JP2014-260230 20141224
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/12

Abstract:
A thin film transistor (TFT) located on a thin film transistor substrate includes a first insulating film formed so as to cover a gate electrode, a channel layer that is formed at a position on the first insulating film overlapping the gate electrode and formed of an oxide semiconductor, a second insulating film formed on the channel layer, and a third insulating film formed so as to cover the second insulating film. A source electrode and a drain electrode are formed on the third insulating film. Each of the source electrode and the drain electrode is connected to the channel layer through the corresponding one of contact holes penetrating the second insulating film and the third insulating film.
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