Invention Grant
- Patent Title: Manufacturing method for semiconductor device having hole penetrating stack structure
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Application No.: US15155937Application Date: 2016-05-16
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Publication No.: US09911751B2Publication Date: 2018-03-06
- Inventor: Woo June Kwon , Jong Hoon Kim , Chan Sun Hyun
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2015-0182876 20151221
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L27/11582 ; H01L27/11565 ; H01L27/11568 ; H01L23/528 ; H01L23/522 ; H01L21/768

Abstract:
A manufacturing method for a semiconductor device includes forming a first stacked structure, forming a first hole penetrating the first stacked structure, forming a reflective metal pattern in the first hole, filling an etch stop layer in the first hole and over the reflective metal pattern, forming a second stacked structure over the first stacked structure, and forming a second hole penetrating the second stacked structure to expose the etch stop layer.
Public/Granted literature
- US20170179148A1 MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE Public/Granted day:2017-06-22
Information query
IPC分类: