Invention Grant
- Patent Title: Method for dissolving a silicon dioxide layer
-
Application No.: US15350290Application Date: 2016-11-14
-
Publication No.: US09911624B2Publication Date: 2018-03-06
- Inventor: Didier Landru , Oleg Kononchuk
- Applicant: Soitec
- Applicant Address: FR Bernin
- Assignee: SOITEC
- Current Assignee: SOITEC
- Current Assignee Address: FR Bernin
- Agency: TraskBritt
- Priority: FR1300706 20130325
- Main IPC: H01L21/331
- IPC: H01L21/331 ; H01L21/322 ; H01L21/762 ; H01L21/324

Abstract:
This disclosure relates to a method for dissolving a silicon dioxide layer in a structure, including, from the back surface thereof to the front surface thereof, a supporting substrate, the silicon dioxide layer and a semiconductor layer, the dissolution method being implemented in a furnace in which structures are supported on a support, the dissolution method resulting in the diffusion of oxygen atoms included in the silicon dioxide layer through the semiconductor layer and generating volatile products, and the furnace including traps suitable for reacting with the volatile products, so as to reduce the concentration gradient of the volatile products parallel to the front surface of at least one structure.
Public/Granted literature
- US20170062236A1 METHOD FOR DISSOLVING A SILICON DIOXIDE LAYER Public/Granted day:2017-03-02
Information query
IPC分类: