Invention Grant
- Patent Title: Method of negative tone development using a copolymer multilayer electrolyte and articles made therefrom
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Application No.: US15223822Application Date: 2016-07-29
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Publication No.: US09910353B2Publication Date: 2018-03-06
- Inventor: Phillip D. Hustad , Jong Park , Jieqian Zhang , Vipul Jain , Jin Wuk Sung
- Applicant: Dow Global Technologies LLC , ROHM AND HAAS ELECTRONIC MATERIALS LLC
- Applicant Address: US MI Midland US MA Marlborough
- Assignee: DOW GLOBAL TECHNOLOGIES LLC,ROHM AND HAAS ELECTRONIC MATERIALS LLC
- Current Assignee: DOW GLOBAL TECHNOLOGIES LLC,ROHM AND HAAS ELECTRONIC MATERIALS LLC
- Current Assignee Address: US MI Midland US MA Marlborough
- Agency: Cantor Colburn LLP
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/09 ; G03F7/038 ; C08F293/00 ; G03F7/16 ; G03F7/20 ; G03F7/32 ; H01L21/308 ; G03F7/40 ; H01L21/027 ; C09D153/00

Abstract:
Disclosed herein is a multi-layered article, comprising a substrate; and two or more layers disposed over the substrate, wherein each said layer comprises a block copolymer comprising a first block and a second block, wherein the first block comprises a repeat unit containing a hydrogen acceptor or a hydrogen donor, and the second block comprises a repeat unit containing a hydrogen donor when the repeat unit of the first block contains a hydrogen acceptor, or a hydrogen acceptor when the repeat unit of the first block contains a hydrogen donor; wherein the first block of an innermost of said two or more layers is bonded to the substrate, and the first block of each layer disposed over the innermost layer is bonded to the second block of a respective underlying layer; and wherein the hydrogen donor or hydrogen acceptor of the second block of an outermost said two or more layers is blocked.
Public/Granted literature
- US20180031971A1 METHOD OF NEGATIVE TONE DEVELOPMENT USING A COPOLYMER MULTILAYER ELECTROLYTE AND ARTICLES MADE THEREFROM Public/Granted day:2018-02-01
Information query
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