- Patent Title: Microactuator arrangement for deflecting electromagnetic radiation
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Application No.: US14206381Application Date: 2014-03-12
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Publication No.: US09910267B2Publication Date: 2018-03-06
- Inventor: Ulrich Hofmann
- Applicant: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
- Current Assignee Address: DE Munich
- Agency: Schwegman Lundberg & Woessner, P.A.
- Priority: DE102013206396 20130411
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10
Abstract:
A microactuator arrangement for the deflection of electromagnetic radiation, with a mirror plate which is suspended on a drive frame in a movable manner about a first rotation axis via spring elements, wherein the drive frame is suspended on a chip frame in a movable manner about a second rotation axis via spring elements, wherein the drive frame is not closed and comprises a recess adjacent to the mirror plate and wherein the chip frame at least in the region of the recess of the drive frame is not closed, in a manner such that a deflected and/or incident beam is not inhibited by the drive frame and the chip frame.
Public/Granted literature
- US20140333980A1 MICROACTUATOR ARRANGEMENT FOR DEFLECTING ELECTROMAGNETIC RADIATION Public/Granted day:2014-11-13
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