Invention Grant
- Patent Title: Actuator control device, optical module, electronic apparatus, and actuator control method
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Application No.: US14603902Application Date: 2015-01-23
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Publication No.: US09910262B2Publication Date: 2018-03-06
- Inventor: Nozomu Hirokubo
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2014-012125 20140127
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G02B26/02 ; H02N1/00 ; G05B6/00 ; G01J3/26 ; G05B6/02

Abstract:
A spectroscopic measurement apparatus includes an electrostatic actuator that is driven by applying a drive voltage, a gap detector that detects a dimension of a gap, a closed loop system that controls the drive voltage applied to the electrostatic actuator depending on a detection signal from the gap detector, and a gain setting unit that sets a gain in the closed loop system depending on drive characteristics of electrostatic actuator based on the detection signal of the gap detector.
Public/Granted literature
- US20150212313A1 ACTUATOR CONTROL DEVICE, OPTICAL MODULE, ELECTRONIC APPARATUS, AND ACTUATOR CONTROL METHOD Public/Granted day:2015-07-30
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