Invention Grant
- Patent Title: Transmission system for transmitting pulse laser beam to extreme ultraviolet light chamber, and laser system
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Application No.: US15422489Application Date: 2017-02-02
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Publication No.: US09888555B2Publication Date: 2018-02-06
- Inventor: Masahiko Ando , Yoshifumi Ueno , Toru Suzuki
- Applicant: GIGAPHOTON INC.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: G01J3/10
- IPC: G01J3/10 ; H05G2/00

Abstract:
The transmission system may include: an optical path adjustment device configured to substantially unify optical paths of a first pre-pulse laser beam and a second pre-pulse laser beam; an optical path separation device configured to separate the optical paths of the substantially unified first pre-pulse laser beam and the second pre-pulse laser beam to an optical path for the first pre-pulse laser beam and an optical path for the second pre-pulse laser beam; a first beam adjustment device disposed on the optical path for the first pre-pulse laser beam separated by the optical path separation device and configured to adjust a beam parameter of the first pre-pulse laser beam; and a second beam adjustment device disposed on the optical path for the second pre-pulse laser beam separated by the optical path separation device and configured to adjust a beam parameter of the second pre-pulse laser beam.
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