Invention Grant
- Patent Title: Infrared sensor, thermal imaging camera and method for producing a microstructure from thermoelectric sensor rods
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Application No.: US14384993Application Date: 2013-02-11
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Publication No.: US09887339B2Publication Date: 2018-02-06
- Inventor: Harry Hedler , Ingo Kuehne , Markus Schieber , Joerg Zapf
- Applicant: SIEMENS AKTIENGESELLSCHAFT
- Applicant Address: DE Munich
- Assignee: SIEMENS AKTIENGESELLSCHAFT
- Current Assignee: SIEMENS AKTIENGESELLSCHAFT
- Current Assignee Address: DE Munich
- Agency: Slayden Grubert Beard PLLC
- Priority: DE102012203792 20120312
- International Application: PCT/EP2013/052662 WO 20130211
- International Announcement: WO2013/135447 WO 20130919
- Main IPC: H01B12/00
- IPC: H01B12/00 ; G01J5/02 ; G01J5/12 ; H01L35/32 ; H01L35/34 ; H01L35/00

Abstract:
An infrared sensor with a microstructure has a multiplicity of sensor rods protruding from a sensor base and arranged axially parallel to one another. Each of the sensor rods is designed as a thermocouple, in that a first rod end, arranged on the sensor base, is electrically connected to an opposite free second rod end by both a first and a second electrically conductive rod element. The two rod elements have a different Seebeck coefficient, and the first rod element is formed as a hollow profile and the second rod element is arranged in the first rod element such that each thermocouple is formed as a single rod with a small standing area on the sensor base.
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