Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US15212463Application Date: 2016-07-18
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Publication No.: US09887273B2Publication Date: 2018-02-06
- Inventor: Tatsuo Ishida , Hiroshi Kanno , Hironobu Hamanaka
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/1157 ; H01L27/11582 ; H01L27/11573 ; H01L23/522 ; H01L23/528 ; H01L23/532 ; H01L29/10

Abstract:
A semiconductor memory device includes a conductive layer on a source side; a first electrode layer provided on the conductive layer; a second electrode layer provided between the conductive layer and the first electrode layer; a semiconductor layer extending through the first electrode in a first direction from the conductive layer to the first electrode layer; a first semiconductor body provided between the conductive layer and the semiconductor layer, the first semiconductor body including first impurities; and a second semiconductor body provided between the conductive layer and the first semiconductor body, the second semiconductor body including second impurities with a higher concentration than a concentration of the first impurities in the first semiconductor body. A diffusion coefficient of the second impurities in the second semiconductor body is smaller than a diffusion coefficient of the second impurities in the first semiconductor body.
Public/Granted literature
- US20170288038A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2017-10-05
Information query
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