Invention Grant
- Patent Title: Solid-state imaging device, manufacturing method of solid-state imaging device, and electronic device
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Application No.: US15309300Application Date: 2015-05-01
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Publication No.: US09887219B2Publication Date: 2018-02-06
- Inventor: Takuya Sano , Ryusei Naito , Kazunobu Ota
- Applicant: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: Sony Semiconductor Solutions Corporation
- Current Assignee: Sony Semiconductor Solutions Corporation
- Current Assignee Address: JP Kanagawa
- Agency: Sheridan Ross P.C.
- Priority: JP2014-102181 20140516; JP2015-048488 20150311
- International Application: PCT/JP2015/063057 WO 20150501
- International Announcement: WO2015/174296 WO 20151119
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H04N5/374 ; H04N5/225

Abstract:
The present technology relates to a solid-state imaging device, a manufacturing method of a solid-state imaging device, and an electronic device, in which degradation of transfer characteristics of a photo diode can be suppressed. A floating diffusion is formed to reach the same depth as a layer of a photo diode formed on a silicon substrate, and a transfer transistor gate is formed therebetween. A channel that is opened/closed by control of the transfer transistor gate is formed in the silicon substrate formed with the photo diode. With this configuration, charge accumulated in the photo diode can be transferred to the floating diffusion in a vertical direction relative to the depth direction, and degradation of transfer characteristics caused by elimination of the transfer channel can be suppressed by setting the transfer channel in the depth direction. The present technology can be applied to a solid-state imaging device.
Public/Granted literature
- US20170077155A1 SOLID-STATE IMAGING DEVICE, MANUFACTURING METHOD OF SOLID-STATE IMAGING DEVICE, AND ELECTRONIC DEVICE Public/Granted day:2017-03-16
Information query
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