Invention Grant
- Patent Title: Interconnects for vertical-transport field-effect transistors
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Application No.: US15198044Application Date: 2016-06-30
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Publication No.: US09887192B2Publication Date: 2018-02-06
- Inventor: Edward J. Nowak , Brent A. Anderson
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Yuanmin Cai
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/088 ; H01L29/78 ; H01L29/08 ; H01L21/8234

Abstract:
Structures and fabrication methods for vertical-transport field-effect transistors. The structure includes a vertical-transport field-effect transistor having a source/drain region located in a semiconductor layer, a fin projecting from the source/drain region in the semiconductor layer, and a gate electrode on the semiconductor layer and coupled with the fin. The structure further includes an interconnect located in a trench defined in the semiconductor layer. The interconnect is coupled with the source/drain region or the gate electrode of the vertical-transport field-effect transistor, and may be used to couple the source/drain region or the gate electrode of the vertical-transport field-effect transistor with a source/drain region or a gate electrode of another vertical-transport field-effect transistor.
Public/Granted literature
- US20180006023A1 INTERCONNECTS FOR VERTICAL-TRANSPORT FIELD-EFFECT TRANSISTORS Public/Granted day:2018-01-04
Information query
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