Invention Grant
- Patent Title: Circuit redistribution structure unit and method for manufacturing circuit redistribution structure
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Application No.: US15257897Application Date: 2016-09-06
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Publication No.: US09887153B2Publication Date: 2018-02-06
- Inventor: Yu-Hua Chen , Cheng-Ta Ko
- Applicant: Unimicron Technology Corp.
- Applicant Address: TW Taoyuan
- Assignee: UNIMICRON TECHNOLOGY CORP.
- Current Assignee: UNIMICRON TECHNOLOGY CORP.
- Current Assignee Address: TW Taoyuan
- Agency: CKC & Partners Co., Ltd.
- Priority: TW105120843A 20160630
- Main IPC: H05K1/00
- IPC: H05K1/00 ; H01L23/498 ; H01L21/48 ; H01L23/00

Abstract:
A method for manufacturing a circuit redistribution structure includes the following steps. A first dielectric is formed on a carrier. Conductive blind vias are formed in the first dielectric. A first circuit redistribution layer is formed on the first dielectric. A second dielectric is formed on the first dielectric. First and second holes are formed on the second dielectric. A trench is formed in the second dielectric to divide the second dielectric into first and second portions. A first portion of the first circuit redistribution layer and the first hole are disposed in the first portion of the second dielectric, and a second portion of the first circuit redistribution layer and the second hole are disposed in the second portion of the second dielectric. Conductive blind vias are formed in the first and second holes, and a second circuit redistribution layer is formed on the second dielectric.
Public/Granted literature
- US20180005931A1 CIRCUIT REDISTRIBUTION STRUCTURE UNIT AND METHOD FOR MANUFACTURING CIRCUIT REDISTRIBUTION STRUCTURE Public/Granted day:2018-01-04
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