Invention Grant
- Patent Title: Substrate warpage control using temper glass with uni-directional heating
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Application No.: US14767508Application Date: 2014-09-27
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Publication No.: US09887110B2Publication Date: 2018-02-06
- Inventor: Chee Key Chung , Takashi Shuto
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- International Application: PCT/US2014/057921 WO 20140927
- International Announcement: WO2016/048383 WO 20160331
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/67 ; H01L21/48 ; H01L21/687 ; H01L21/324 ; H01L23/498

Abstract:
A method including clamping an integrated circuit package substrate between first and second supporting substrates; exposing the clamped package substrate to a heat source from a single direction; and modifying a shape of the package substrate. An apparatus including a first and second supporting substrates, the first supporting substrate including a two-dimensional area that is 75 percent to 95 percent of the area of the first side of the package substrate and the second supporting substrate including a two-dimensional area that is at least equivalent to the area of a package substrate and each of the first supporting substrate and the second supporting substrate include a body having a cavity therein such that when assembled on opposite sides of a package substrate, each cavity has a volume dimension such that the body of the supporting substrate is not in contact with an area of a package substrate.
Public/Granted literature
- US20160268149A1 SUBSTRATE WARPAGE CONTROL USING TEMPER GLASS WITH UNI-DIRECTIONAL HEATING Public/Granted day:2016-09-15
Information query
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