- Patent Title: Surface inspection device, surface inspection method, and program
-
Application No.: US15506613Application Date: 2015-07-21
-
Publication No.: US09885668B2Publication Date: 2018-02-06
- Inventor: Takafumi Komatsu , Yoshihisa Abe , Wataru Yamaguchi , Yosuke Takebe
- Applicant: Konica Minolta, Inc.
- Applicant Address: JP Tokyo
- Assignee: Konica Minolta, Inc.
- Current Assignee: Konica Minolta, Inc.
- Current Assignee Address: JP Tokyo
- Agency: Osha Liang LLP
- Priority: JP2014-175407 20140829
- International Application: PCT/JP2015/070690 WO 20150721
- International Announcement: WO2016/031434 WO 20160303
- Main IPC: G01N21/55
- IPC: G01N21/55 ; G01N21/95
Abstract:
A surface inspection device includes an opening defining an aperture plane, one or more optical transceivers, and a processor. Each optical transceiver includes a light emitter and a light receiver that are arranged in different directions with respect to the aperture plane when viewed from above a virtual normal line of the aperture plane. The processor acquires detection values from the optical transceivers and calculates an evaluation value of a degree of variation in the detection values.
Public/Granted literature
- US20170261439A1 SURFACE INSPECTION DEVICE, SURFACE INSPECTION METHOD, AND PROGRAM Public/Granted day:2017-09-14
Information query
