Invention Grant
- Patent Title: Rare-earth oxide based monolithic chamber material
-
Application No.: US15211933Application Date: 2016-07-15
-
Publication No.: US09884787B2Publication Date: 2018-02-06
- Inventor: Jennifer Y. Sun , Biraja P. Kanungo
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: C04B35/505
- IPC: C04B35/505 ; C04B35/50 ; C04B35/626 ; C04B37/00 ; C04B37/02 ; H01L21/687 ; C23C16/44 ; H01J37/32 ; C23C4/11 ; C23C4/134 ; C04B35/622 ; C23C16/40 ; H01L21/67 ; H01L21/683 ; C23C16/455 ; C23C16/50 ; C23C14/22
Abstract:
An article comprises a plasma resistant ceramic material comprising 40 mol % to less than 100 mol % of Y2O3, above 0 mol % to 60 mol % of ZrO2, and above 0 mol % to 5 mol % of Al2O3.
Public/Granted literature
- US20160326060A1 RARE-EARTH OXIDE BASED MONOLITHIC CHAMBER MATERIAL Public/Granted day:2016-11-10
Information query
IPC分类:
