Invention Grant
- Patent Title: Ultraviolet photodetectors and methods of making ultraviolet photodetectors
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Application No.: US15217952Application Date: 2016-07-22
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Publication No.: US09865766B2Publication Date: 2018-01-09
- Inventor: Rhonda R. Willigan , Jose L. Santana , Marcin Piech , Joseph V. Mantese
- Applicant: Carrier Corporation
- Applicant Address: US CT Farmington
- Assignee: Carrier Corporation
- Current Assignee: Carrier Corporation
- Current Assignee Address: US CT Farmington
- Agency: Locke Lord LLP
- Agent Scott D. Wofsy; Christopher J. Cillié
- Main IPC: H01L31/18
- IPC: H01L31/18 ; C01G9/00 ; C09D1/00 ; C09D5/24 ; C09D5/32 ; C23C18/12 ; G01J1/42
Abstract:
A method of making an ultraviolet sensor includes applying a metal-containing solution to a substrate using a spin coating technique to form a metal-containing coat. The metal-containing coat is baked and pyrolyzed to form a metal-containing oxide film on the substrate. The metal-containing oxide film has a cubic crystalline structure suitable for ultraviolet photodetectors in flame detection applications.
Public/Granted literature
- US20170033256A1 ULTRAVIOLET PHOTODETECTORS AND METHODS OF MAKING ULTRAVIOLET PHOTODETECTORS Public/Granted day:2017-02-02
Information query
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