- Patent Title: Semiconductor device and semiconductor-device manufacturing method
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Application No.: US15057375Application Date: 2016-03-01
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Publication No.: US09865639B2Publication Date: 2018-01-09
- Inventor: Kan Shimizu , Keishi Inoue
- Applicant: Sony Corporation
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sheridan Ross P.C.
- Priority: JP2011-216930 20110930
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L27/14 ; H01L23/48 ; H01L21/44

Abstract:
It is possible to reduce resistance variations of a member connecting a through-silicon via to a line and improve wiring reliability. A hole through which the through-silicon via is to be stretched is created and an over-etching process is carried out on a wiring layer including the line. Then, by embedding copper in the hole, the through-silicon via made of the copper can be created. After the through-silicon via has been connected to the line made of aluminum through the member which is a connection area, the connection area is alloyed in a thermal treatment in order to electrically connect the through-silicon via to the line. Thus, it is possible to reduce variations of a resistance between the through-silicon via and the line and also improve wiring reliability as well. The present technology can be applied to a semiconductor device and a method for manufacturing the semiconductor device.
Public/Granted literature
- US20160181303A1 SEMICONDUCTOR DEVICE AND SEMICONDUCTOR-DEVICE MANUFACTURING METHOD Public/Granted day:2016-06-23
Information query
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