Invention Grant
- Patent Title: Integrated thinfilm resistor and MIM capacitor with a low serial resistance
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Application No.: US15003955Application Date: 2016-01-22
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Publication No.: US09865582B2Publication Date: 2018-01-09
- Inventor: Christoph Dirnecker
- Applicant: Texas Instruments Deutschland GMBH
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Tuenlap D. Chan; Charles A. Brill; Frank D. Cimino
- Main IPC: H01L27/01
- IPC: H01L27/01 ; H01L49/02 ; H01L21/70 ; H01L23/522 ; H01L21/311 ; H01L21/3213 ; H01L23/532

Abstract:
An electronic device comprising a semiconductor structure having a back end capacitor and a back end thin film resistor and a method of manufacturing the same. The semiconductor structure includes a first dielectric layer, a bottom plate of the capacitor and a thin film resistor body. The bottom plate and the resistor body are laterally spaced apart portions of the same thin film layer. The bottom plate further includes a conductive layer overlying the thin film layer. A second dielectric layer is disposed on the conductive layer of the bottom plate of the capacitor. A top plate of the capacitor is disposed on the second dielectric layer.
Public/Granted literature
- US20160141283A1 INTEGRATED THINFILM RESISTOR AND MIM CAPACITOR WITH A LOW SERIAL RESISTANCE Public/Granted day:2016-05-19
Information query
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