Invention Grant
- Patent Title: Substrate plating jig
-
Application No.: US14441648Application Date: 2012-11-14
-
Publication No.: US09865493B2Publication Date: 2018-01-09
- Inventor: Junichiro Yoshioka , Takashi Murayama
- Applicant: JCU CORPORATION
- Applicant Address: JP Taito-ku
- Assignee: JCU CORPORATION
- Current Assignee: JCU CORPORATION
- Current Assignee Address: JP Taito-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- International Application: PCT/JP2012/079519 WO 20121114
- International Announcement: WO2014/076781 WO 20140522
- Main IPC: H01L21/687
- IPC: H01L21/687 ; C25D17/06 ; C25D17/00

Abstract:
A plating jig that can form a metal plating film simultaneously on both surfaces of a semiconductor wafer by one plating process. The plating jig includes a base section and a cover section that can hold a substrate to be plated, and a center section that holds the substrate between the base section and cover section; the base section, the cover section and the center section each having an annular portion having an opening at a center thereof; seal packings each having a conductive ring disposed thereon being attached to each of facing surfaces of the annular portions of the base section and the cover section; the substrate to be plated being disposed inside the opening of the center section; and the substrate to be plated being held from front and back surfaces thereof with the seal packings attached to the cover section and the center section.
Public/Granted literature
- US20150294894A1 SUBSTRATE PLATING JIG Public/Granted day:2015-10-15
Information query
IPC分类: