Invention Grant
- Patent Title: Servo integrated BPM template
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Application No.: US15233277Application Date: 2016-08-10
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Publication No.: US09865294B2Publication Date: 2018-01-09
- Inventor: ShuaiGang Xiao , XiaoMin Yang , David S. Kuo , Kim Yang Lee , Yautzong Hsu
- Applicant: Seagate Technology LLC
- Applicant Address: US CA Cupertino
- Assignee: Seagate Technology LLC
- Current Assignee: Seagate Technology LLC
- Current Assignee Address: US CA Cupertino
- Main IPC: G11B5/855
- IPC: G11B5/855 ; G11B5/596 ; G11B20/12
Abstract:
Provided herein is a method including forming a data zone guiding pattern and forming a servo zone guiding pattern. A servo pattern and a data pattern are simultaneously formed. Directed self-assembly of block copolymers is guided by the data zone guiding pattern and the servo zone guiding pattern.
Public/Granted literature
- US20170084300A1 SERVO INTEGRATED BPM TEMPLATE Public/Granted day:2017-03-23
Information query
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