Invention Grant
- Patent Title: X-ray nondestructive testing device
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Application No.: US14844168Application Date: 2015-09-03
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Publication No.: US09863897B2Publication Date: 2018-01-09
- Inventor: Naozo Sugimoto , Toshihiko Nishizaki , Masahiro Inoue , Masuo Amma , Masaru Nakamura
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Minato-Ku, Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Minato-Ku, Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer
- Main IPC: G01N23/083
- IPC: G01N23/083 ; G01B15/02

Abstract:
There is provided an X-ray nondestructive testing device which irradiates X-rays to an article, the article including a substrate having a predetermined X-ray absorption coefficient and a measurement target object disposed therein and having another X-ray absorption coefficient differing from that of the substrate, the device including: an X-ray source configured to irradiate the X-rays to the article; a detector configured to detect the transmission amounts of the X-rays passed through the article at at least paired different locations; a detection position specifying designator configured to specify the paired different locations as a set of paired locations based on a pre-stored design information; a driving mechanism configured to move the detector to the set of paired locations; and an operation calculator configured to calculate the thickness of the measurement target object based on the transmission amounts of the X-rays detected by the detector.
Public/Granted literature
- US20150377801A1 X-RAY NONDESTRUCTIVE TESTING DEVICE Public/Granted day:2015-12-31
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