Invention Grant
- Patent Title: Component having a substrate with cavities with micromechanical structures located therein
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Application No.: US14355464Application Date: 2012-11-02
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Publication No.: US09862596B2Publication Date: 2018-01-09
- Inventor: Stefan Günthner , Bernhard Schmid
- Applicant: Continental Teves AG & Co. OHG
- Applicant Address: DE Frankfurt
- Assignee: CONTINENTAL TEVES AG & CO. OHG
- Current Assignee: CONTINENTAL TEVES AG & CO. OHG
- Current Assignee Address: DE Frankfurt
- Agency: Brinks Gilson & Lione
- Priority: DE102011085723 20111103
- International Application: PCT/EP2012/071721 WO 20121102
- International Announcement: WO2013/064632 WO 20130510
- Main IPC: B81C1/00
- IPC: B81C1/00 ; G01P15/08

Abstract:
A micromechanical component formed from, a substrate (100) having a first cavity (112) and a second cavity (113), a first micromechanical structure (117) arranged in the first cavity (112), and a second micromechanical structure (118) arranged in the second cavity (113). The first cavity (112) and the second cavities having respective first and second gas pressures having different values. The first gas pressure is provided by a closed configuration of the first cavity (112) and a first channel (115) opens into the second cavity (113), and the second gas pressure is adjustable via the first channel (115).
Public/Granted literature
- US20140306300A1 Component and Method for Producing a Component Public/Granted day:2014-10-16
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