Invention Grant
- Patent Title: Linear motor and stage apparatus
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Application No.: US14408130Application Date: 2013-07-02
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Publication No.: US09755493B2Publication Date: 2017-09-05
- Inventor: Liwei Wu , Qingsheng Chen , Lanzhou Yan
- Applicant: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
- Applicant Address: CN Shanghai
- Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Current Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Current Assignee Address: CN Shanghai
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: CN201210270584 20120731; CN201210525941 20121207
- International Application: PCT/CN2013/078671 WO 20130702
- International Announcement: WO2014/019438 WO 20140206
- Main IPC: H02K41/02
- IPC: H02K41/02 ; H02K41/03

Abstract:
A linear motor includes a magnet unit and a coil unit. The magnet unit includes two magnet arrays oppositely parallel and symmetrically located on a magnetic yoke: a first and a second magnet array. The coil unit is disposed in a magnetic gap between the two magnet arrays. In a spatial rectangular coordinate system defined by X, Y and Z axes, the coil unit includes a first and a second coil array arranged in a stacked manner in the Z-axis direction and staggered from each other by a distance of ΔP in the Y-axis direction. ΔP satisfies: when a control system charges the coil unit with a desired current, the coil unit generates a control force along the Y-axis direction, another control force along the Z-axis direction, and a moment about the X-axis direction, which may reduce a magnetic flux leakage and provide higher driving forces, making the linear motor generate required three degrees-of-freedom control force or control torque, and further improve vertical and horizontal magnetic fluxes in the magnet array.
Public/Granted literature
- US20150137624A1 LINEAR MOTOR AND STAGE APPARATUS Public/Granted day:2015-05-21
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