- Patent Title: Laser-induced thermal imaging apparatus, method of laser-induced thermal imaging, and manufacturing method of organic light-emitting display apparatus using the method
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Application No.: US14052089Application Date: 2013-10-11
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Publication No.: US09755190B2Publication Date: 2017-09-05
- Inventor: Seung-Ho Myoung , Won-Yong Kim
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2013-0041836 20130416
- Main IPC: H01L51/56
- IPC: H01L51/56 ; H01L51/00

Abstract:
A laser-induced thermal imaging apparatus includes a substrate support unit and a laser beam irradiation unit. The substrate support unit and the laser beam irradiation unit move relative to each other so that the substrate arranged on the substrate support unit is scanned in one direction by a laser beam irradiated from the laser beam irradiation unit. The laser beam irradiation unit includes a beam generation unit, a first mask arranged on a path of the linear laser beam generated in the beam generation unit, the first mask including a plurality of openings arranged along a length direction of the linear laser beam, and a shield unit movable to expose all of the plurality of openings of the first mask or to shield at least some of the plurality of the openings of the first mask.
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