Invention Grant
- Patent Title: Non-volatile memory device
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Application No.: US15201708Application Date: 2016-07-05
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Publication No.: US09754954B2Publication Date: 2017-09-05
- Inventor: Masaaki Higuchi , Katsuyuki Sekine , Fumiki Aiso , Takuo Ohashi , Tatsuya Okamoto
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L27/11556 ; H01L29/778 ; H01L21/02 ; H01L27/11519 ; H01L27/11524 ; H01L27/1157 ; H01L27/11582 ; H01L27/11565

Abstract:
According to one embodiment, a non-volatile memory device includes a plurality of electrodes, at least one semiconductor layer, conductive layers, and first and second insulating films. The electrodes are arranged side by side in a first direction. The semiconductor layer extends into the electrodes in the first direction. The conductive layers are provided between each electrode and the semiconductor layer and separated from each other in the first direction. The first insulating film contacts the conductive layers, and extends in the first direction along the semiconductor layer between the conductive layers and the semiconductor layer. The second insulating film is provided between the first insulating film and the semiconductor layer. The first insulating film includes a first portion located between the conductive layers and the second insulating film, and a second portion located between the interlayer insulating film and the second insulating film.
Public/Granted literature
- US20160315092A1 NON-VOLATILE MEMORY DEVICE Public/Granted day:2016-10-27
Information query
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