Invention Grant
- Patent Title: Integrated circuits having multiple gate devices with dual threshold voltages and methods for fabricating such integrated circuits
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Application No.: US14938499Application Date: 2015-11-11
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Publication No.: US09754939B2Publication Date: 2017-09-05
- Inventor: Shyue Seng Tan , Kiok Boone Elgin Quek
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Lorenz & Kopf, LLP
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L29/66 ; H01L21/8238

Abstract:
Integrated circuits including multiple gate devices with dual threshold voltages and methods for fabricating such integrated circuits are provided. An exemplary method for fabricating an integrated device includes providing a semiconductor fin structure overlying a semiconductor substrate. The semiconductor fin structure has a first sidewall, a second sidewall opposite the first sidewall, and an upper surface. The method includes forming a first gate along the first sidewall of the semiconductor fin structure with a first threshold voltage. Further, the method includes forming a second gate along the second sidewall of the semiconductor fin structure with a second threshold voltage different from the first threshold voltage.
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