Invention Grant
- Patent Title: Adaptable end effector
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Application No.: US15046527Application Date: 2016-02-18
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Publication No.: US09754812B2Publication Date: 2017-09-05
- Inventor: Arnon Ben-Natan
- Applicant: CAMTEK LTD.
- Applicant Address: IL Migdal Haemeq
- Assignee: CAMTEK LTD.
- Current Assignee: CAMTEK LTD.
- Current Assignee Address: IL Migdal Haemeq
- Agency: Reches Patents
- Main IPC: B66C1/02
- IPC: B66C1/02 ; B25B11/00 ; H01L21/683 ; B25J15/06 ; B25J11/00 ; H01L21/687

Abstract:
An adaptable end effector may include a substrate interface may be configured to support a substrate. The substrate interface may include multiple groups of vacuum openings that are associated with a plurality of types of substrates. A vacuum system may be configured to supply vacuum only to one or more selected groups of vacuum openings that are associated with a given type of substrates when the adaptable end effector supports a substrate of the given type of substrates.
Public/Granted literature
- US20160247706A1 ADAPTABLE END EFFECTOR Public/Granted day:2016-08-25
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