Invention Grant
- Patent Title: Increasing the gas efficiency for an electrostatic chuck
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Application No.: US14529985Application Date: 2014-10-31
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Publication No.: US09753463B2Publication Date: 2017-09-05
- Inventor: Vijay D. Parkhe
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/687 ; G05D7/06 ; H01L21/67 ; H01L21/683
Abstract:
A gas is received through an inlet. A portion of the gas is supplied to an electrostatic chuck. A portion of the gas is re-circulated through a compressor. A pressure of the second portion of the gas is increased. The second portion of the gas is stored in a gas storage.
Public/Granted literature
- US20160079105A1 INCREASING THE GAS EFFICIENCY FOR AN ELECTROSTATIC CHUCK Public/Granted day:2016-03-17
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