Invention Grant
- Patent Title: Piezoelectric device, liquid ejection head, and liquid ejection apparatus
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Application No.: US15192823Application Date: 2016-06-24
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Publication No.: US09751307B2Publication Date: 2017-09-05
- Inventor: Motoki Takabe , Shiro Yazaki , Yuma Fukuzawa , Eiju Hirai
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Workman Nydegger
- Priority: JP2015-133270 20150702
- Main IPC: B41J2/045
- IPC: B41J2/045 ; B41J2/14 ; H01L41/047 ; H01L41/08 ; H01L41/083 ; H01L41/09 ; H01L41/187 ; H01L41/332

Abstract:
An empty chamber component includes a pressure chamber formation substrate where a pressure chamber as an empty chamber is defined and a communication substrate bonded to the pressure chamber formation substrate. A piezoelectric element is provided on one side of the pressure chamber formation substrate. A flexible surface is located between the piezoelectric element and the pressure chamber. Empty portions are defined by the communication substrate closing recessed portions in the pressure chamber formation substrate. The empty portions are formed at positions where ends of the active section of the piezoelectric element pass through the empty portions in plan view.
Public/Granted literature
- US20170001442A1 PIEZOELECTRIC DEVICE, LIQUID EJECTION HEAD, AND LIQUID EJECTION APPARATUS Public/Granted day:2017-01-05
Information query
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