Invention Grant
- Patent Title: High-temperature, spin-on, bonding compositions for temporary wafer bonding using sliding approach
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Application No.: US12770075Application Date: 2010-04-29
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Publication No.: US09728439B2Publication Date: 2017-08-08
- Inventor: Sunil K. Pillalamarri , Chenghong Li
- Applicant: Sunil K. Pillalamarri , Chenghong Li
- Applicant Address: US MO Rolla
- Assignee: Brewer Science Inc.
- Current Assignee: Brewer Science Inc.
- Current Assignee Address: US MO Rolla
- Agency: Hovey Williams LLP
- Main IPC: B32B38/00
- IPC: B32B38/00 ; H01L21/683 ; B29B17/02 ; B32B38/10 ; B32B43/00

Abstract:
New compositions and methods of using those compositions as bonding compositions are provided. The compositions comprise a polymer dispersed or dissolved in a solvent system, and can be used to bond an active wafer to a carrier wafer or substrate to assist in protecting the active wafer and its active sites during subsequent processing and handling. The compositions form bonding layers that are chemically and thermally resistant, but that can also be softened to allow the wafers to slide apart at the appropriate stage in the fabrication process.
Public/Granted literature
- US20100206479A1 HIGH-TEMPERATURE, SPIN-ON, BONDING COMPOSITIONS FOR TEMPORARY WAFER BONDING USING SLIDING APPROACH Public/Granted day:2010-08-19
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