Invention Grant
- Patent Title: Method for fabricating NANO structure including dielectric particle supporters
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Application No.: US14312388Application Date: 2014-06-23
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Publication No.: US09725313B2Publication Date: 2017-08-08
- Inventor: Jun-Hyung Kim
- Applicant: SK INNOVATION CO., LTD.
- Applicant Address: KR Seoul
- Assignee: SK INNOVATION CO., LTD.
- Current Assignee: SK INNOVATION CO., LTD.
- Current Assignee Address: KR Seoul
- Agency: IP & T Group LLP
- Priority: KR10-2013-0159741 20131219; KR10-2013-0159758 20131219; KR10-2013-0159765 20131219
- Main IPC: B81C1/00
- IPC: B81C1/00 ; H01L29/66 ; B82Y30/00 ; B82Y40/00 ; C01B33/18

Abstract:
Provided is a nano structure including dielectric particle supporters, a fabrication method thereof, and an application device thereof. The method for fabricating a nano structure includes: forming a plurality of dielectric particle supporters over a substrate, the dielectric particle supporters including linkers thereon; forming a plurality of metal ions to the linkers; and forming one or more metallic nanoparticles over the linkers.
Public/Granted literature
- US20150175411A1 METHOD FOR FABRICATING NANO STRUCTURE INCLUDING DIELECTRIC PARTICLE SUPPORTERS Public/Granted day:2015-06-25
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