Invention Grant
- Patent Title: Method of producing a high-voltage transistor
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Application No.: US15147860Application Date: 2016-05-05
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Publication No.: US09722047B2Publication Date: 2017-08-01
- Inventor: Martin Knaipp
- Applicant: ams AG
- Applicant Address: AT Unterpremstaetten
- Assignee: AMS AG
- Current Assignee: AMS AG
- Current Assignee Address: AT Unterpremstaetten
- Agency: McDermott Will & Emery LLP
- Priority: EP12159949 20120316
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/66 ; H01L29/78 ; H01L29/06 ; H01L21/266 ; H01L29/10 ; H01L21/265 ; H01L29/08

Abstract:
The high-voltage transistor device comprises a semiconductor substrate (1) with a source region (2) of a first type of electrical conductivity, a body region (3) including a channel region (4) of a second type of electrical conductivity opposite to the first type of conductivity, a drift region (5) of the first type of conductivity, and a drain region (6) of the first type of conductivity extending longitudinally in striplike fashion from the channel region (4) to the drain region (6) and laterally confined by isolation regions (9). The drift region (5) comprises a doping of the first type of conductivity and includes an additional region (8) with a net doping of the second type of conductivity to adjust the electrical properties of the drift region (5). The drift region depth and the additional region depth do not exceed the maximal depth (17) of the isolation regions (9).
Public/Granted literature
- US20160247898A1 HIGH-VOLTAGE FIELD-EFFECT TRANSISTOR AND METHOD OF MAKING THE SAME Public/Granted day:2016-08-25
Information query
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