Invention Grant
- Patent Title: LDMOS device and fabrication method thereof
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Application No.: US15053001Application Date: 2016-02-25
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Publication No.: US09721806B2Publication Date: 2017-08-01
- Inventor: Lei Fang
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
- Applicant Address: CN Shanghai
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee Address: CN Shanghai
- Agency: Anova Law Group, PLLC
- Priority: CN201510125915 20150320
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/06 ; H01L21/311 ; H01L29/423 ; H01L29/66 ; H01L21/762 ; H01L29/10

Abstract:
The disclosed subject matter provides an LDMOS device and fabrication method thereof. In an LDMOS device, a drift region and a body region are formed in a substrate. A first trench is formed in the drift region and in the substrate between the drift region and the body region. The first trench is separated from the drift region by a first shallow trench isolation structure. A gate dielectric layer is formed on a side surface and a bottom surface of the first trench. A gate electrode filling up the first trench is formed on the gate dielectric layer with a top surface above a top surface of the semiconductor substrate. A source region is formed in the body region on one side of the gate electrode and a drain region is formed in the drift region on another side of the gate electrode.
Public/Granted literature
- US20160276476A1 LDMOS DEVICE AND FABRICATION METHOD THEREOF Public/Granted day:2016-09-22
Information query
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