Invention Grant
- Patent Title: Grid, method of manufacturing the same, and ion beam processing apparatus
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Application No.: US15366660Application Date: 2016-12-01
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Publication No.: US09721747B2Publication Date: 2017-08-01
- Inventor: Masashi Tsujiyama , Yukito Nakagawa , Yasushi Yasumatsu
- Applicant: CANON ANELVA CORPORATION
- Applicant Address: JP Kawasaki-Shi
- Assignee: CANON ANELVA CORPORATION
- Current Assignee: CANON ANELVA CORPORATION
- Current Assignee Address: JP Kawasaki-Shi
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2015-052363 20150316
- Main IPC: H01J9/14
- IPC: H01J9/14 ; H01J27/02 ; H01J27/16 ; H01J37/04 ; H01J37/08
Abstract:
A grid of the present invention is a plate-shaped grid provided with a hole. The grid is formed of a carbon-carbon composite including carbon fibers arranged in random directions along a planar direction of the grid, and the hole is formed in the grid so as to cut off the carbon fibers.
Public/Granted literature
- US20170084419A1 GRID, METHOD OF MANUFACTURING THE SAME, AND ION BEAM PROCESSING APPARATUS Public/Granted day:2017-03-23
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