Invention Grant
- Patent Title: Contact layer for magnetic tunnel junction element and manufacturing method thereof
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Application No.: US14630376Application Date: 2015-02-24
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Publication No.: US09698342B2Publication Date: 2017-07-04
- Inventor: Yuichi Ito
- Applicant: Yuichi Ito
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Agency: Holtz, Holtz & Volek PC
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L43/08 ; H01L43/12 ; H01L27/22

Abstract:
According to one embodiment, a semiconductor memory device includes a magnetic tunnel junction (MTJ) element includes a first magnetic layer, a second magnetic layer and a non-magnetic layer between the first and second magnetic layers, a contact layer formed underneath the MTJ element, the contact layer being formed of a first material, and a first layer formed around the contact layer, wherein the first layer in contact with a side surface of the contact layer, has a first width extending parallel to a stacking direction of the MTJ element, and a second width extending perpendicularly to the direction of extension of the first width, the second width being less than the first width.
Public/Granted literature
- US20160079308A1 SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2016-03-17
Information query
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